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Campanella, Humberto.

Acoustic wave and electromechanical resonators : concept to key applications / Acoustic wave & electromechanical resonators Humberto Campanella. - Norwood, MA. : Artech House, 2010. - xv, 345 p. : ill. ; 26 cm.

Includes bibliographical references and index.

1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies.

ISBN: 9781607839774 1607839776

Subjects--Topical Terms:
Acoustic surface wave devices.
Electric resonators.

LC Class. No.: QP517.B54 / C687

Dewey Class. No.: 621.381 / C186