Library of American University of Madaba

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Ukita, H.

Micromechanical photonics / H. Ukita. - Berlin : Springer-Verlag, 2006. - xi, 250 p. : ill. ; 25 cm. - Microtechnology and MEMS, 1615-8326 .

Includes bibliographical references (p. [227]-242) and index.

ISBN: 3540313338 (hbk. alk. paper) 9783540313335 (hbk. alk. paper)

Subjects--Topical Terms:
Photonics.
Microelectronics.
Microelectromechanical systems.

Dewey Class. No.: 621.36 / U34