Library of American University of Madaba

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Zhang, G. Q.

Mechanics of microelectronics / by G.Q. Zhang, W.D. van Driel and X.J. Fan. - Dordrecht : Springer, 2006. - xiii, 563 p. : ill. ; 25 cm. - Solid mechanics and its applications ; v. 141 .

State of the art report.

Includes bibliographical references.

ISBN: 140204934X (hd. bd.) 9781402049347 (hd. bd.)

Subjects--Topical Terms:
Microelectronics.
Mechanical engineering.

Dewey Class. No.: 621.381 / Z632