Library of American University of Madaba

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Franssila, Sami.

Introduction to microfabrication / Sami Franssila. - Chichester, England : Wiley, 2004. - xvii, 401 p. : ill. ; 26 cm.

Includes bibliographical references and index.

ISBN: 9780470851067 0470851066 (pbk.)

Subjects--Topical Terms:
Microelectromechanical systems.
Electronic apparatus and appliances.
Microfabrication

LC Class. No.: TK7875 / .F73 2004

Dewey Class. No.: 621.3 / F835