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Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators (Record no. 27276)

000 -LEADER
fixed length control field 04679nam a22005295i 4500
003 - CONTROL NUMBER IDENTIFIER
control field OSt
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20140310153040.0
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
fixed length control field cr nn 008mamaa
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 100316s2010 ne | s |||| 0|eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9789048138074
978-90-481-3807-4
050 #4 - LIBRARY OF CONGRESS CALL NUMBER
Classification number TP248.13-248.65
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 660.6
Edition number 23
264 #1 -
-- Dordrecht :
-- Springer Netherlands,
-- 2010.
912 ## -
-- ZDB-2-PHA
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Gusev, Evgeni.
Relator term editor.
245 10 - IMMEDIATE SOURCE OF ACQUISITION NOTE
Title Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
Medium [electronic resource] /
Statement of responsibility, etc edited by Evgeni Gusev, Eric Garfunkel, Arthur Dideikin.
246 3# - VARYING FORM OF TITLE
Title proper/short title Proceedings of the NATO Advanced Research Worskhop on Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators St. Petersburg, Russia 29 June - 2 July 2008
300 ## - PHYSICAL DESCRIPTION
Extent IX, 313p.
Other physical details online resource.
440 1# - SERIES STATEMENT/ADDED ENTRY--TITLE
Title NATO Science for Peace and Security Series B: Physics and Biophysics,
International Standard Serial Number 1874-6500
505 0# - FORMATTED CONTENTS NOTE
Formatted contents note MEMS/NEMS Technologies and Applications -- History of Early Research on MEMS in Russia (U.S.S.R.) -- Challenges of Complete CMOS/MEMS Systems Integration -- MEMS for Practical Applications -- Nanochip: A MEMS-Based Ultra-High Data Density Memory Device -- Low Cost Silicon Coriolis’ Gyroscope Paves the Way to Consumer IMU -- Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors -- Monocrystalline-Silicon Microwave MEMS Devices -- Three-Dimensional Photonic Crystals Based on Opal-Semiconductor and Opal-Metal Nanocomposites -- MEMS Device and Reliability Physics -- Pull-in Dynamics of Electrostatically Actuated Bistable Micro Beams -- Path Following and Numerical Continuation Methods for Non-Linear MEMS and NEMS -- The Impact of Dielectric Material and Temperature on Dielectric Charging in RF MEMS Capacitive Switches -- Advanced Processes and Materials -- Development of DRIE for the Next Generation of MEMS Devices -- Low-Temperature Processes for MEMS Device Fabrication -- High-Temperature Stable Au–Sn and Cu–Sn Interconnects for 3D Stacked Applications -- 3D Integration of MEMS and IC: Design, Technology and Simulations -- Low-Frequency Electronic Noise in the Back-Gated and Top-Gated Graphene Devices -- Modeling of Dry Etching in Production of MEMS -- XRD and Raman Study of Low Temperature AlGaAs/GaAs (100) Heterostructures -- Internal Stresses in Martensite Formation in Copper Based Shape Memory Alloys -- Sensors -- Smart Sensors: Advantages and Pitfalls -- Vertically Integrated MEMS SOI Composite Porous Silicon-Crystalline Silicon Cantilever-Array Sensors: Concept for Continuous Sensing of Explosives and Warfare Agents -- Integration of Diverse Biological Materials in Micro/Nano Devices -- Force Sensing Optimization and Applications -- Using Parametric Resonance to Improve Micro Gyrsocope Robustness.
520 ## - SUMMARY, ETC.
Summary, etc The main goal of this book is to review recent progress and current status of MEMS/NEMS technologies and devices. Several important areas are discussed: history of research in the field, device physics, examples of sucessful applications, sensors, materials and processing aspects. The authors who have contributed to the book represent a diverse group of leading scientists from academic, industrial and governmental labs worldwide who bring a broad array of backgrounds such as device physics, technologists, electrical and mechanical engineering, surface chemistry and materials science). The contributions to this book are accessible to both expert scientists and engineers who need to keep up with leading edge research, and newcomers to the field who wish to learn more about the exciting basic and applied research issues relevant to micromechanical devices and technologies.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Chemistry.
Topical term or geographic name as entry element Microreactors.
Topical term or geographic name as entry element Mechanics.
Topical term or geographic name as entry element Mechanical engineering.
Topical term or geographic name as entry element Engineering.
Topical term or geographic name as entry element Microwaves.
Topical term or geographic name as entry element Chemistry.
Topical term or geographic name as entry element Microengineering.
Topical term or geographic name as entry element Nanotechnology and Microengineering.
Topical term or geographic name as entry element Mechanics.
Topical term or geographic name as entry element Mechanical Engineering.
Topical term or geographic name as entry element Microwaves, RF and Optical Engineering.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Garfunkel, Eric.
Relator term editor.
Personal name Dideikin, Arthur.
Relator term editor.
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element SpringerLink (Online service)
773 0# - HOST ITEM ENTRY
Title Springer eBooks
776 08 - ADDITIONAL PHYSICAL FORM ENTRY
Display text Printed edition:
International Standard Book Number 9789048138050
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier http://dx.doi.org/10.1007/978-90-481-3807-4
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme
Item type E-Book
Copies
Price effective from Permanent location Date last seen Not for loan Date acquired Source of classification or shelving scheme Koha item type Damaged status Lost status Withdrawn status Current location Full call number
2014-04-24AUM Main Library2014-04-24 2014-04-24 E-Book   AUM Main Library660.6
Languages: 
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