| 000 -LEADER |
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| fixed length control field |
02875nam a22004575i 4500 |
| 003 - CONTROL NUMBER IDENTIFIER |
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| control field |
OSt |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20140310153334.0 |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
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| fixed length control field |
cr nn 008mamaa |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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| fixed length control field |
111107s2012 au | s |||| 0|eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9783709104248 |
|
978-3-7091-0424-8 |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
T174.7 |
|
|---|
| Classification number |
TA418.9.N35 |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
620.115 |
| Edition number |
23 |
| 264 #1 - |
|---|
| -- |
Vienna : |
| -- |
Springer Vienna, |
| -- |
2012. |
| 912 ## - |
|---|
| -- |
ZDB-2-CMS |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Stepanova, Maria. |
| Relator term |
editor. |
| 245 10 - IMMEDIATE SOURCE OF ACQUISITION NOTE |
|---|
| Title |
Nanofabrication |
| Medium |
[electronic resource] : |
| Remainder of title |
Techniques and Principles / |
| Statement of responsibility, etc |
edited by Maria Stepanova, Steven Dew. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
VIII, 344 p. |
| Other physical details |
online resource. |
| 505 0# - FORMATTED CONTENTS NOTE |
|---|
| Formatted contents note |
1 Introduction -- Directions in Nanofabrication -- 2 Nanolithography -- Fundamentals of Electron Beam Exposure and Development -- Simulation of Electron Beam Exposure and Resist Processing for Nano-Patterning -- Helium Ion Lithography -- Nanoimprint Technologies -- 3 Deposition at the Nanoscale -- Atomic Layer Deposition for Nanotechnology -- Surface Functionalization in the Nanoscale Domain -- Nanostructures Based on Self-Assembly of Block Copolymers -- Epitaxial Growth of Metals on Semiconductors Via Electrodeposition -- 4 Nanoscale Etching and Patterning -- Chemical Mechanical Polish for Nanotechnology -- Deposition, Milling, and Etching with a Focused Helium Ion Beam -- Laser Nanopatterning -- Templating and Pattern Transfer Using Anodized Nanoporous Alumina/Titania.-. |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc |
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Nanochemistry. |
|
|---|
| Topical term or geographic name as entry element |
Engineering. |
|
|---|
| Topical term or geographic name as entry element |
Nanotechnology. |
|
|---|
| Topical term or geographic name as entry element |
Materials Science. |
|
|---|
| Topical term or geographic name as entry element |
Nanotechnology. |
|
|---|
| Topical term or geographic name as entry element |
Nanochemistry. |
|
|---|
| Topical term or geographic name as entry element |
Nanotechnology and Microengineering. |
|
|---|
| Topical term or geographic name as entry element |
Laser Technology, Photonics. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Dew, Steven. |
| Relator term |
editor. |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
SpringerLink (Online service) |
| 773 0# - HOST ITEM ENTRY |
|---|
| Title |
Springer eBooks |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY |
|---|
| Display text |
Printed edition: |
| International Standard Book Number |
9783709104231 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
http://dx.doi.org/10.1007/978-3-7091-0424-8 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
|
| Item type |
E-Book |
