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Photomask fabrication technology / (Record no. 31095)

000 -LEADER
fixed length control field 01137cam a22002774a 4500
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20200116085835.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 050415s2005 nyua b 001 0 eng
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0071445633 (alk. paper)
International Standard Book Number 9780071445634
041 ## - Language
Language code of text/sound track or separate title eng
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.381531
Edition number 22
Item number E979
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Eynon, Benjamin G.
9 (RLIN) 32824
245 10 - IMMEDIATE SOURCE OF ACQUISITION NOTE
Title Photomask fabrication technology /
Statement of responsibility, etc Benjamin G. Eynon, Jr., Banqiu Wu.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc New York :
Name of publisher, distributor, etc McGraw-Hill,
Date of publication, distribution, etc 2005.
300 ## - PHYSICAL DESCRIPTION
Extent xi, 571 p. :
Other physical details ill. ;
Dimensions 24 cm.
440 #0 - SERIES STATEMENT/ADDED ENTRY--TITLE
Title McGraw-Hill electronic engineering
9 (RLIN) 32825
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc Includes bibliographical references and index.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Integrated circuits
General subdivision Masks.
9 (RLIN) 32826
Topical term or geographic name as entry element Masks (Electronics)
9 (RLIN) 32827
Topical term or geographic name as entry element Microlithography.
9 (RLIN) 32828
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Wu, Banqiu.
9 (RLIN) 32829
Relator term author
856 42 - ELECTRONIC LOCATION AND ACCESS
Materials specified Contributor biographical information
Uniform Resource Identifier http://www.loc.gov/catdir/enhancements/fy0624/2005047886-b.html
Materials specified Publisher description
Uniform Resource Identifier http://www.loc.gov/catdir/enhancements/fy0624/2005047886-d.html
Materials specified Table of contents only
Uniform Resource Identifier http://www.loc.gov/catdir/enhancements/fy0624/2005047886-t.html
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme
Item type Book
Copies
Price effective from Permanent location Date last seen Not for loan Date acquired Source of classification or shelving scheme Koha item type Barcode Damaged status Lost status Withdrawn status Current location Full call number
2015-01-13AUM Main Library2015-01-13 2015-01-13 BookAUM-019059   AUM Main Library621.381531 E979

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