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Introduction to microfabrication /

by Franssila, Sami.
Published by : Wiley, (Chichester, England :) Physical details: xvii, 401 p. : ill. ; 26 cm. ISBN: 0470851066 Subject(s): Microelectromechanical systems. | Electronic apparatus and appliances. | Microfabrication Year: 2004
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Item type Location Call Number Status Date Due
Book Book AUM Main Library English Collections Hall 621.3 F835 (Browse Shelf) Available

Includes bibliographical references and index.

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