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Interfacial Compatibility in Microelectronics by Laurila, Tomi. Publication: . X, 218 p. Availability: Copies available: AUM Main Library (1),
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Advanced Mechatronics and MEMS Devices by Zhang, Dan. Publication: . XI, 249 p. 172 illus. Availability: Copies available: AUM Main Library (1),
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MEMS Linear and Nonlinear Statics and Dynamics by Younis, Mohammad I. Publication: . XVI, 456 p. Availability: Copies available: AUM Main Library (1),
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