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Silicon Carbide Microsystems for Harsh Environments
by Wijesundara, Muthu B.J.
Publication:
. XVI, 232 p.
Availability:
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(1),
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Radioisotope Thin-Film Powered Microsystems
by Duggirala, Rajesh.
Publication:
. XXXIV, 198 p.
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(1),
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MEMS Reliability
by Hartzell, Allyson L.
Publication:
. XIII, 291 p.
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Multi-Wafer Rotating MEMS Machines
by Lang, Jeffrey.
Publication:
. XIV, 454p. 604 illus., 302 illus. in color.
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MEMS Materials and Processes Handbook
by Ghodssi, Reza.
Publication:
. XXXVI, 1188 p. 200 illus.
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RF MEMS Switches and Integrated Switching Circuits
by Liu, Ai-Qun.
Publication:
. X, 274 p.
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(1),
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