Normal View MARC View ISBD View

Introductory MEMS

by Adams, Thomas M.
Authors: Layton, Richard A.%author. | SpringerLink (Online service) Physical details: XV, 444p. 50 illus., 25 illus. in color. online resource. ISBN: 038709511X Subject(s): Engineering. | Mechanics. | Materials. | Electronics. | Systems engineering. | Surfaces (Physics). | Engineering. | Electronics and Microelectronics, Instrumentation. | Circuits and Systems. | Mechanics. | Surfaces and Interfaces, Thin Films. | Continuum Mechanics and Mechanics of Materials.
Tags from this library:
No tags from this library for this title.
Item type Location Call Number Status Date Due
E-Book E-Book AUM Main Library 621.381 (Browse Shelf) Not for loan

Fabrication -- The substrate and adding material to it -- Creating and transferring patterns—Photolithography -- Creating structures—Micromachining -- Solid mechanics -- Applications -- Thinking about modeling -- MEMS transducers—An overview of how they work -- Piezoresistive transducers -- Capacitive transducers -- Piezoelectric transducers -- Thermal transducers -- to microfluidics -- Laboratories -- Microfabrication laboratories.

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.

There are no comments for this item.

Log in to your account to post a comment.

English |