Library of American University of Madaba

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Nassar, Raja.

Modelling of microfabrication systems / Raja Nassar, Weizhong Dai. - Berlin : Springer, 2003. - x, 269 p. : ill. ; 24 cm. - Microtechnology and MEMS, 1615-8326 .

Includes bibliographical references (p. [249]-261) and index.

ISBN: 9783540002529 3540002529 (alk. paper)

Subjects--Topical Terms:
Microelectronics--Mathematical models.
Integrated circuits--Mathematical models.
Microelectromechanical systems--Mathematical models.

Dewey Class. No.: 621.381 / N187