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Modelling of microfabrication systems /

by Nassar, Raja.
Authors: Dai, Weizhong,%1962-%author Series: Microtechnology and MEMS, 1615-8326 Published by : Springer, (Berlin :) Physical details: x, 269 p. : ill. ; 24 cm. ISBN: 3540002529 Subject(s): Microelectronics %Mathematical models. | Integrated circuits %Mathematical models. | Microelectromechanical systems %Mathematical models. Year: 2003
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Item type Location Call Number Status Date Due
Book Book AUM Main Library 621.381 N187 (Browse Shelf) Available
Book Book AUM Main Library 621.381 N187 (Browse Shelf) Available
Book Book AUM Main Library 621.381 N187 (Browse Shelf) Available

Includes bibliographical references (p. [249]-261) and index.

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