| 000 -LEADER |
|---|
| fixed length control field |
00993cam a22002534a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20200114121618.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
030417s2003 gw a b 001 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9783540002529 |
|
|---|
| International Standard Book Number |
3540002529 (alk. paper) |
| 041 ## - Language |
|---|
| Language code of text/sound track or separate title |
eng |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381 |
| Edition number |
21 |
| Item number |
N187 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Nassar, Raja. |
| 9 (RLIN) |
31008 |
| 245 10 - IMMEDIATE SOURCE OF ACQUISITION NOTE |
|---|
| Title |
Modelling of microfabrication systems / |
| Statement of responsibility, etc |
Raja Nassar, Weizhong Dai. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc |
Berlin : |
| Name of publisher, distributor, etc |
Springer, |
| Date of publication, distribution, etc |
2003. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
x, 269 p. : |
| Other physical details |
ill. ; |
| Dimensions |
24 cm. |
| 440 #0 - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Microtechnology and MEMS, |
| International Standard Serial Number |
1615-8326 |
| 9 (RLIN) |
31009 |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc |
Includes bibliographical references (p. [249]-261) and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Microelectronics |
| General subdivision |
Mathematical models. |
| 9 (RLIN) |
31010 |
|
|---|
| Topical term or geographic name as entry element |
Integrated circuits |
| General subdivision |
Mathematical models. |
| 9 (RLIN) |
31011 |
|
|---|
| Topical term or geographic name as entry element |
Microelectromechanical systems |
| General subdivision |
Mathematical models. |
| 9 (RLIN) |
31012 |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Dai, Weizhong, |
| Dates associated with a name |
1962- |
| 9 (RLIN) |
31013 |
| Relator term |
author |
| 856 41 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Table of contents only |
| Uniform Resource Identifier |
http://www.loc.gov/catdir/enhancements/fy0816/2003050541-t.html |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
|
| Item type |
Book |
