Formation of arrayed Au nanoparticles on SiO2/Si substrate by use of dewetting phenomenon: An example of bottom-up technologies in MEMS -- Nanofriction by Reciprocating Sliding -- The structure and tribological behaviors of nanostructure thin films -- Detection of lateral forces and formation of atomic chains -- Reducing friction force on silicon surface using submicron- to atomic-scale geometry effects -- Microfabricated sleds for friction studies -- Vapor Phase Lubrication-Nanotribology Fundamentals and MEMS Applications -- A Novel Method of Lubrication of Micro-Electro-Mechanical Systems -- Robust Tribological Solutions for Silicon and Polymer Based MEMS/NEMS -- Lubrication of High Sliding MEMS -- Pre-modifications of Si surface to enhance the wear durability of PFPE nano-lubricant -- Probing the complexities of Friction in submicron contacts between two pristine surfaces -- Atomistic Simulation of Polymer Nanotribology -- Simulation of frictional behavior of polymer-on-polymer sliding -- Fundamentals of friction and wear mechanisms at loads relevant to MEMS applications.

This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed.