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Photomask fabrication technology /

by Eynon, Benjamin G.
Authors: Wu, Banqiu.%author Series: McGraw-Hill electronic engineering Published by : McGraw-Hill, (New York :) Physical details: xi, 571 p. : ill. ; 24 cm. ISBN: 0071445633 Subject(s): Integrated circuits %Masks. | Masks (Electronics) | Microlithography. Year: 2005
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Item type Location Call Number Status Date Due
Book Book AUM Main Library 621.381531 E979 (Browse Shelf) Available

Includes bibliographical references and index.

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