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Mechanics of microelectronics /

by Zhang, G. Q.
Authors: Driel, W. D. van.%author | Fan, X. J.%editor Series: Solid mechanics and its applications ; . v. 141 Published by : Springer, (Dordrecht :) Physical details: xiii, 563 p. : ill. ; 25 cm. ISBN: 140204934X Subject(s): Microelectronics. | Mechanical engineering. Year: 2006
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State of the art report.

Includes bibliographical references.

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