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FEM and micromechatronics with ATILA software /
by Uchino, Kenji,
Publication:
Boca Raton, FL : CRC Press/Taylor & Francis Group, 2008
. xix, 338 p. :
28 cm. +
Date:2008
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(2),
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Inertial MEMS : , principles and practice /
by Kempe, Volker.
Publication:
Cambridge : Cambridge University Press, 2011
. xiv, 475 p. :
26 cm.
Date:2011
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(2),
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Advanced RF MEMS /
by Lucyszyn, S.
Publication:
New York : Cambridge University Press, 2010
. xxviii, 412 p. :
26 cm.
Date:2010
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(2),
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Microrobotics : , methods and applications /
by Bellouard, Yves.
Publication:
Boca Raton, FL : CRC Press, 2010
. xix, 436 p., [8] p. of plates :
25 cm.
Date:2010
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(2),
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Modelling of microfabrication systems /
by Nassar, Raja.
Publication:
Berlin : Springer, 2003
. x, 269 p. :
24 cm.
Date:2003
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Copies available:
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(3),
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Micromechanical photonics /
by Ukita, H.
Publication:
Berlin : Springer-Verlag, 2006
. xi, 250 p. :
25 cm.
Date:2006
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(1),
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Micromechanics and nanoscale effects : , MEMS, multi-scale materials and micro-flows /
Publication:
Dordrecht : Kluwer Academic, 2004
. xv, 240 p. :
25 cm.
Date:2004
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(1),
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ASME _ Journal of micro- and nano-manufacturing.
Publication:
. v.
28 cm.
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No cover image available
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Introduction to microfabrication /
by Franssila, Sami.
Publication:
Chichester, England : Wiley, 2004
. xvii, 401 p. :
26 cm.
Date:2004
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Handbook of microelectromechanical systems /
Publication:
New York : NY Research Press, 2015
. vii, 294 p. ;
23 cm.
Date:2015
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