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Micromechanical photonics /

by Ukita, H.
Series: Microtechnology and MEMS, 1615-8326 Published by : Springer-Verlag, (Berlin :) Physical details: xi, 250 p. : ill. ; 25 cm. ISBN: 3540313338 Subject(s): Photonics. | Microelectronics. | Microelectromechanical systems. Year: 2006
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Item type Location Call Number Status Date Due
Book Book AUM Main Library 621.36 U34 (Browse Shelf) Available

Includes bibliographical references (p. [227]-242) and index.

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