MEMS/NEMS Technologies and Applications -- History of Early Research on MEMS in Russia (U.S.S.R.) -- Challenges of Complete CMOS/MEMS Systems Integration -- MEMS for Practical Applications -- Nanochip: A MEMS-Based Ultra-High Data Density Memory Device -- Low Cost Silicon Coriolis’ Gyroscope Paves the Way to Consumer IMU -- Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors -- Monocrystalline-Silicon Microwave MEMS Devices -- Three-Dimensional Photonic Crystals Based on Opal-Semiconductor and Opal-Metal Nanocomposites -- MEMS Device and Reliability Physics -- Pull-in Dynamics of Electrostatically Actuated Bistable Micro Beams -- Path Following and Numerical Continuation Methods for Non-Linear MEMS and NEMS -- The Impact of Dielectric Material and Temperature on Dielectric Charging in RF MEMS Capacitive Switches -- Advanced Processes and Materials -- Development of DRIE for the Next Generation of MEMS Devices -- Low-Temperature Processes for MEMS Device Fabrication -- High-Temperature Stable Au–Sn and Cu–Sn Interconnects for 3D Stacked Applications -- 3D Integration of MEMS and IC: Design, Technology and Simulations -- Low-Frequency Electronic Noise in the Back-Gated and Top-Gated Graphene Devices -- Modeling of Dry Etching in Production of MEMS -- XRD and Raman Study of Low Temperature AlGaAs/GaAs (100) Heterostructures -- Internal Stresses in Martensite Formation in Copper Based Shape Memory Alloys -- Sensors -- Smart Sensors: Advantages and Pitfalls -- Vertically Integrated MEMS SOI Composite Porous Silicon-Crystalline Silicon Cantilever-Array Sensors: Concept for Continuous Sensing of Explosives and Warfare Agents -- Integration of Diverse Biological Materials in Micro/Nano Devices -- Force Sensing Optimization and Applications -- Using Parametric Resonance to Improve Micro Gyrsocope Robustness.

The main goal of this book is to review recent progress and current status of MEMS/NEMS technologies and devices. Several important areas are discussed: history of research in the field, device physics, examples of sucessful applications, sensors, materials and processing aspects. The authors who have contributed to the book represent a diverse group of leading scientists from academic, industrial and governmental labs worldwide who bring a broad array of backgrounds such as device physics, technologists, electrical and mechanical engineering, surface chemistry and materials science). The contributions to this book are accessible to both expert scientists and engineers who need to keep up with leading edge research, and newcomers to the field who wish to learn more about the exciting basic and applied research issues relevant to micromechanical devices and technologies.